ALD / CVD Precursor Series Products

High-purity ALD/CVD precursor product is one of the core source materials in the whole electronic industry system. It has been widely used in many aspects of electronic devices manufacturing, such as computer chips, solar cells, mobile communications, satellite navigation, spacecraft and so on. It plays an important role in aerospace, new solar cells, electronic products and other fields.

Hexachlorodisilane

Cl6Si2

≥99.999995%

Tetraethyl orthosilicate

C8H20O4Si

≥99.9999999%

Octamethyl cyclotetrasiloxane

C8H24O4Si4

≥99.999999%

Tetramethylsilane

C4H12Si

≥99.99999%

Trimethylborate

C6H15BO3

≥99.9999999%

Triethylphosphate

C6H15O4P

≥99.9999999%

Tetrakis(dimethylamido)titanium

C8H24N4Ti

≥99.9999%

Titaniumtetrachloride

Cl4Ti

≥99.99999%