High-purity Electronic Special Gas Series Products

High-purity arsine, phosphine and other special gases are the main supporting materials in IC fabrication. They are widely used in electronic industry, solar cells, mobile communications, automotive navigation, aerospace, military industry and so on. The purity of phosphine and arsine products sold by Nata Opto-electronic Material reaches 6N level. 

And more products, NATA also provide a variety of electrical gas mixtures such as phosphine & arsine mixtures, disilane mixture, etc. The equilibrium gas can be chosen in hydrogen H2, helium He, nitrogen N2, argon Ar, etc. other mixtures can be customized under customer requirements. The cylinder size will be 47L, 470L and specially ordered by customer.

Phosphine

PH3

≥99.9999%

Arsine

AsH3

≥99.9999%

Phosphine(AGS)

PH3

≥99.9997%

Arsine(AGS)

AsH3

≥99.9995%

Boron trifluoride(AGS)

BF3

≥99.9%

PH3 MIXTURE GAS

99.9999%/99.99999%

AsH3 MIXTURE GAS

99.9999%/99.99999%

SiH4 MIXTURE GAS

99.9999%/99.99999%

B2H6 MIXTURE GAS

99.999%/99.9999%

Si2H6 MIXTURE GAS

99.999%/99.9999%